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采用灯丝热解化学气相沉积方法，在不同的碳源气体气氛中合成金刚石薄膜，并研究不同工艺条件下的金刚石膜生长速率．结果表明，在较低的灯丝分解气体温度和较近的灯丝与衬底距离条件下，以丙酮为碳源气体合成的金刚石膜具有较高的生长速率和较好的质量．
Diamond filament pyrolytic chemical vapor deposition was used to synthesize diamond films in different carbon source gases and to study the growth rate of diamond films under different conditions. The results show that the diamond films synthesized with acetone as the carbon source gas have higher growth rate and better quality under the condition of lower filament decomposition gas temperature and closer distance between filament and substrate.