针对非制冷微测辐射热计焦平面阵列,设计了一种低噪声、高均匀性的读出电路。该读出电路结合相关双采样技术和自归零技术,对固定图像噪声以及l/f噪声都能起到很好的抑制作用。目前,该电路已应用到160×120阵列的非制冷微测辐射热计焦平面上,并在0.5μm CMOS工艺下成功流片。测试结果表明,固定图像噪声仅为0.087 V,均方根噪声为256μV。 Aiming at the focal plane array of uncooled microbolometer, a readout circuit with low noise and high uniformity is designed. This readout circuit, combined with the correlated double sampling technique and the self-zeroing technique, can very well suppress both fixed image noise and l / f noise. At present, the circuit has been applied to the 160 × 120 array of uncooled microbolometer focal plane, and the success of 0.5μm CMOS process chip. The test results show that the fixed image noise is only 0.087 V and the rms noise is 256 μV.