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通过包括所有可能的高阶衍射波,本文计算了量子阱红外探测器一维光栅的光谱响应,发现一维光栅有很宽的光谱范围,可以同时覆盖3~5μm和8~14μm两个波段,这将有益于红外焦平面列阵和双色探测器的设计.同时,文中就光栅深度和沟道宽度对光栅光谱响应的影响作了研究,发现光栅的深度对其光谱响应和耦合效率有明显的影响,存在一个对应最大耦合效率的光栅深度。
By including all possible high-order diffracted waves, we calculate the spectral response of a one-dimensional grating of a quantum well infrared detector. We find that the one-dimensional grating has a wide spectral range and can cover both the 3 ~ 5μm and 8 ~ 14μm bands. This will benefit the design of infrared focal plane arrays and two-color detectors. In the meantime, the influence of grating depth and channel width on the spectral response of the grating is studied. It is found that the depth of the grating has a significant effect on the spectral response and coupling efficiency, and there is a grating depth corresponding to the maximum coupling efficiency.