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采用ZDH-100型号离子束复合沉积设备沉积WS_2-Ti-Ag复合薄膜,基材为轴承钢和单晶硅(100).采用场发射扫描电子显微镜、XRD衍射仪,检测复合薄膜的表面形貌、微观结构.采用球-盘式摩擦磨损试验机,对复合薄膜在大气环境中的摩擦性能进行了研究.结果表明:采用离子束辅助沉积技术制备的WS_2-Ti-Ag复合薄膜是非晶态薄膜;并且随法向载荷的增加,复合薄膜的摩擦因数减小,摩擦状态越稳定,耐磨寿命越短.“,”Ion beam assisted deposition equipment (ZDH - 100) was used to prepare WS_2 - Ti - Ag composite films with the substrates of bearing steel and silicon (100). The microstructure ,thickness and morphology of the WS_2 -Ti- Ag composite films were characterized with field emission scanning electron microscope (FESEM) and X-ray diffraction (XRD). The friction and wear properties for WS_2 - Ti - Ag multi-layered composite films were investigated by ball-on-disk tribometer in atmospheric environment. Results show that WS_2 - Ti - Ag composite films deposited by ion beam assisted deposition technology are amorphous thin films, and with the normal load increasing, friction coefficient of the films is reduced, friction process becomes more stable and wear life shorter.