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首先介绍了两种结构完全对称的高灵敏度的摇摆质量陀螺.设计并制作了一种对角驱动的新型摇摆质量微陀螺.利用硅的各向异性湿法腐蚀等MEMS体加工技术,简化了该微陀螺的制作工艺.该微结构的对称性、一致性和加工精度有很大改善,尤其是振动梁、激励部件和敏感部件等关键部件.详细阐述了该微陀螺的工作原理和结构设计,完成了微陀螺关键部件的制作和样机组装.利用NF公司的FRA 5087频率响应分析仪测试了样机大气下的振动模态,其中驱动频率为5.563 2 kHz,检测频率为5.553 4 kHz,频差为9.8 Hz,小于0.2%.利用频谱分析的方法测试了样机的哥氏力.测试结果表明这种摇摆质量微陀螺的设计与制作方法是可行的.
Firstly, two kinds of highly symmetrical gyroscope gyroscopes with high sensitivity are introduced, and a new type of gyroscopic gyroscope gyroscope is designed and fabricated.With the anisotropic wet etching of silicon and other MEMS processing technologies, this method is simplified Micro-gyroscope manufacturing process.The microstructure symmetry, consistency and processing accuracy has greatly improved, especially the vibration beam, excitation components and sensitive components and other key components.Described in detail the working principle and structure design of the micro-gyroscope, Completed the fabrication of micro-gyro key components and prototype assembly.Using NF’s FRA 5087 frequency response analyzer to test the vibration mode of the prototype under the atmosphere, in which the driving frequency is 5.563 2 kHz, the detection frequency is 5.553 4 kHz, the frequency difference is 9.8 Hz, less than 0.2% .The Coriolis force of the prototype was tested by spectrum analysis.The test results show that the design and fabrication method of the micro-gyro with swing quality is feasible.