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光栅盘作为计量元件,广泛应用于科研生产的许多部门。由于工艺技术的进步和许多新技术的应用,其制造精度越来越高,因而对其检测技术的要求也越来越高。光栅盘各刻线的实际位置与理论位置之间的角差称为刻线误差。在很多仪器中,为了消除光栅盘安装偏心的影响,都采用对径提取信号的方法,因此对光栅盘的要求就不再是刻线误差而是直径误差。在光电检验仪上检测直径误差主要有两种方法:比较法(绝对法)和常角法。比较法就
Raster disk as a measuring element, widely used in many departments of scientific research and production. Due to the advancement of technology and the application of many new technologies, the manufacturing precision is getting higher and higher, and the requirements for its detection technology are also getting higher and higher. The actual angular position of the grating disk and the theoretical position of the angular difference between the reticle as the error. In many instruments, in order to eliminate the influence of the eccentricity of the grating disk installation, a method of extracting the signal from the diameter is adopted. Therefore, the requirement of the grating disk is no longer the scribing error but the diameter error. There are two main methods of detecting diameter errors on the photoelectric tester: comparison method (absolute method) and constant angle method. Comparison method