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为了制造高性能的Pb_(0.8)Sn_(0.2)Te 探测器,在制造过程中必须了解其表面特性并加以控制。把俄歇光谱(AES)和光电子光谱(ESCA)技术用于分析经历了探测器制造的一些步骤以后的Pb_(0.8)Sn_(0.2)Te 表面。本文提供经过化学腐蚀、光刻工艺和热处理以后Pb_(0.8)Sn_(0.2)Te 材料的俄歇光谱和光电子光谱数据。此外,还对暴露于室内环境条件和高湿度条件之后的Pb_(0.8)Sn_(0.2)Te 表面的特性作了描述。而对表面特性有了了解,就可以把它同做成的探测器的参数进行对照,从而确定出制造最优性能探测器的程序,因此也就能找到制造稳定的探测器的工艺。
In order to produce high-performance Pb_ (0.8) Sn_ (0.2) Te detectors, its surface properties must be known and controlled in the manufacturing process. Auger spectroscopy (AES) and photoelectron spectroscopy (ESCA) were used to analyze the surface of Pb_ (0.8) Sn_ (0.2) Te after some steps of detector fabrication. This article provides Auger spectroscopy and photoelectron spectroscopy data for Pb_ (0.8) Sn_ (0.2) Te after chemical etching, photolithography and heat treatment. In addition, the characteristics of Pb_ (0.8) Sn_ (0.2) Te surface exposed to indoor and high humidity conditions are also described. By knowing the surface characteristics, it is possible to compare it with the parameters of the detector made to determine the procedure for creating the optimal performance detector, and thus to find a process for making a stable detector.