四氯化硅作为西门法高纯多晶硅生产中产量最大的副产物,是一种具有强腐蚀性的毒害物质。目前,国内多晶硅的大规模生产即将兴起,解决其副产物四氯化硅的最有效的方法是转化为三氯氢硅。着重介绍了热氢化、冷氢化、氯氢化、等离子体氢化等国内外四氯化硅氢化技术的工艺特点和研究进展。 Silicon tetrachloride is the most toxic by-product of the production of high-purity polysilicon in Western France and is a highly corrosive poison. At present, the domestic large-scale production of polysilicon is about to rise, the most effective way to solve the by-product of silicon tetrachloride is converted to trichlorosilane. The process characteristics and research progress of hydrogenation of silicon tetrachloride at home and abroad, such as thermal hydrogenation, cold hydrogenation, chlorhydrogenation and plasma hydrogenation, are emphatically introduced.