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电子显微镜是一台集多种学科于一体的现代大型、精密的高科技设备。随着使用时间的加长，故障率会不断增加。由于电子显微镜结构复杂，技术先进，给用户单位自己维修带来了很大困难，必须要有一种正确的分析方法，以便能准确而快速地判断出故障的原因。本文通过对ＪＸＡ－７３３ 电子探针的一个有代表性的故障分析实例来详细地介绍如何根据设备所表现出来的故障现象，使用逻辑分析方法，从设备的整体组成框图出发，通过适当的测试和逻辑分析判断，把故障范围从整体缩小到局部区域，然后再从该区域通过测试分析来判断故障产生于某一部分，最后再从该部分中找出具体的故障原因。这样从整体到部分再到具体的逻辑分析方法，很容易快速而正确地找到故障。文中还介绍了为快速分析判断故障，减少检测分析时间而如何选择测试分析点及注意点
Electron microscope is a modern large-scale, sophisticated high-tech equipment that integrates many disciplines. As the use of the longer, the failure rate will continue to increase. Due to the complicated electron microscope structure and advanced technology, it is very difficult for the user unit to repair itself. Therefore, a correct analysis method must be provided so that the cause of the failure can be accurately and quickly determined. In this paper, JXA-733 electronic probe by a representative examples of failure analysis to explain in detail how the device according to the phenomenon of failure, the use of logical analysis, starting from the overall composition of the block diagram of the device, through appropriate testing and Logic analysis to determine the scope of the fault reduced from the overall to the local area, and then from the region through the test analysis to determine the fault generated in a particular part, and finally find the specific cause of the malfunction from the part. So from the whole to the part and then to the specific method of logical analysis, it is easy to quickly and correctly find the fault. The article also describes how to choose the test analysis point and the point of attention for the sake of quick analysis and judgment of the fault and the reduction of the test analysis time