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本文研究了液晶显示器制造ITO薄膜过程中Arcing形成原因及对策。通过对正常ITO成膜原理和异常Arcing形成原因分析,并提出解决对策,有效预防了Arcing发生概率,保证了生产品质。
This paper studies the causes and countermeasures of Arcing during the fabrication of ITO thin films by liquid crystal displays. Through analyzing the reason of normal ITO film formation and abnormal Arcing formation and putting forward countermeasures, the occurrence probability of Arcing is effectively prevented and the production quality is guaranteed.