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为研究石英玻璃基板上二氧化锆薄膜的定向排列特征及相转变对其定向排列的影响 ,采用溶胶凝胶工艺在石英玻璃基体上制备了二氧化锆薄膜 ,并利用 X射线衍射仪及原子力显微镜对薄膜结构进行了分析。结果表明 ,低温二氧化锆薄膜主要由 t- Zr O2 晶粒组成 ,沿 (111)平面定向排列 ,随温度升高 ,t- Zr O2 向 m - Zr O2 转变 ,定向排列也由 t-Zr O2 的 (111)平面转向为 m - Zr O2 的 (111- )平面。与凝胶粉相比 ,二氧化锆薄膜的 t- Zr O2 → m- Zr O2 相转变温度提高10 0℃。 AFM观察显示 ,随温度升高 ,薄膜表面粗糙度增大 ,并且二氧化锆晶粒尺寸由 6 0 0℃ ,保温 1h的 7.5 nm提高至 10 0 0℃ ,保温 1h的 6 5 nm。
In order to study the directional arrangement of zirconium dioxide thin films on quartz glass substrates and the influence of phase transformation on their orientation, zirconium dioxide thin films were prepared on quartz glass by sol-gel process. X-ray diffractometry and atomic force microscope The film structure was analyzed. The results show that the low temperature zirconia films are mainly composed of t-ZrO2 grains oriented along the (111) plane. With the increase of temperature, the transition of t-ZrO2 to m- The (111) plane is turned to the (111-) plane of m - Zr O2. Compared with gel powder, the phase transition temperature of t-Zr O2 → m-Zr O2 increased by 10 ℃. AFM observation showed that the surface roughness of the film increased with the increase of temperature, and the grain size of zirconium dioxide increased from 7.5 nm at 600 ℃ for 1h to 100 ℃ and kept at 65nm for 1h.