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提出一种新的准分子激光电化学加工工艺,在阳极钝化区内,通过准分子激光照射,以实现无屏蔽的各向异性的微加工。对该工艺进行了可行性分析,并对其进行了初步试验,证实在钝化区,准分子激光导致刻蚀电流增加的幅度比较明显,在此基础上,深入研究了在准分子脉冲激光作用过程中,刻蚀电流与脉冲数、脉冲频率之间的关系。表明准分子激光在钝化区具有增强电化学特性的能力。
A new excimer laser electrochemical processing technology is proposed, in which the excimer laser irradiation is performed in the passivation region of the anode to realize the unscaled anisotropic micro-machining. The feasibility of the process was analyzed and preliminary experiments were carried out to confirm that the extent of the increase of the etching current in the passivation region and the excimer laser is obvious. On the basis of this, the effect of the excimer laser pulse The process, the etching current and the number of pulses, the relationship between the pulse frequency. It shows that the excimer laser has the ability to enhance the electrochemical properties in the passivation region.