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通过固定N层和Ti N层的沉积时间,改变Ti层沉积时间,在AZ31镁合金表面采用直流磁控溅射技术制备N-Ti-Ti N镀膜,研究镀钛时间对N-Ti-Ti N镀膜的形貌、腐蚀性能的影响。利用扫描电镜(SEM)、能谱仪等手段分析镀膜的表面形貌和成分,通过动电位极化试验,研究镀膜的耐蚀性。结果表明:改变不同镀钛时间获得的N-Ti-Ti N镀膜的厚度在1~1.4μm之间,镀膜分布均匀,随着镀钛膜沉积时间的增加镀膜的厚度增加,膜间结合性好;与镁合金基体相比,不同镀钛时间的N-Ti-Ti N镀膜均能提高材料的耐蚀性,镀钛时间为20 min的N-Ti-Ti N镀膜的耐蚀性更为优异。
By fixing the deposition time of N layer and TiN layer, the deposition time of Ti layer was changed, and the N-Ti-TiN coating was prepared on the surface of AZ31 magnesium alloy by direct current magnetron sputtering. The effects of Ti plating time on N-Ti-TiN Coating morphology, the impact of corrosion. The surface morphology and composition of the coating were analyzed by means of scanning electron microscope (SEM) and energy dispersive spectrometer. The corrosion resistance of the coating was studied by potentiodynamic polarization test. The results show that the thickness of N-Ti-Ti N coating obtained by changing the different Ti plating time is between 1 ~ 1.4μm and the coating is evenly distributed. With the deposition time of Ti-coating increasing, the thickness of the coating increases and the bonding between the films is good Compared with the magnesium alloy matrix, the N-Ti-TiN coating with different titanium plating time can improve the corrosion resistance of the material. The corrosion resistance of N-Ti-TiN coating with titanium plating time of 20 min is more excellent .