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静电球轴承起支过程中,双边支承下的非线性与轴间耦合较强,必须配置支承垫才能实现任意姿态起支。为了解决静电球轴承无支承垫时的任意姿态起支问题,研究了基于无预载电压偏置的单边支承控制方法。根据非线性的静电力模型,应用反馈线性化方法构造出非线性控制器,使得系统在大范围内精确线性化,然后应用线性系统理论进行设计。实验结果表明,结合单边支承方案与非线性控制方法能够实现静电轴承在任意姿态下的平稳起支,无需配置支承垫,大大简化了对支承电极的工艺要求。
Static ball bearing lifting process, the bilateral support of non-linear and strong coupling between the shaft, the support pad must be configured in order to achieve any gesture from the branch. In order to solve the problem of any posture of static ball bearing without bearing pad, the unilateral support control method based on no preload voltage bias is studied. According to the nonlinear electrostatic force model, a nonlinear controller is constructed by feedback linearization method, which makes the system linearized accurately in a wide range and then designed with linear system theory. The experimental results show that the combination of unilateral support and non-linear control method can achieve stable lifting of the electrostatic bearing in any posture without the need of the support pad, which greatly simplifies the technical requirements of the support electrode.