金刚石由于具有高硬度、高热导率、高红外透过率和优异的半导体特性,在高技术和未来的工业领域有广泛的应用前景.尤其是它的高热导率特性是最吸引人的一个研究领域,因为用金刚石制作的大功率半导体器件及微波器件的热沉将大大提高这些器件的性能.但是由于天然金刚石价格昂贵,潜在的市场并不广泛.而人工合成的金刚石膜由于成本低,并可制备成各种形状和尺寸的膜,作为散热材料的应用前景十分广阔.但是由于在制备金刚石膜的 Due to its high hardness, high thermal conductivity, high infrared transmittance and excellent semiconductor properties, diamond has wide applications in high-tech and future industrial fields, especially its high thermal conductivity characteristic is the most attractive one Because the heat sinks of high-power semiconductor devices made of diamond and microwave devices will greatly improve the performance of these devices.But due to the high price of natural diamond, the potential market is not wide, while the synthetic diamond film is low cost and Can be prepared into a variety of shapes and sizes of films, as a heat sink material has a very broad application prospects.But due to the preparation of diamond film