一、序言众所周知,杂质在半导体中起着非常重要的作用。在测量其导电性和控制这些杂质的同时,有必要通过分析直接了解其种类和数量。尽管如此,20年前要进行这样的分析那是非常困难的,所以不得不依靠专门的电气测量。其后,由于半导体事业发展的需要,以及分析化学的全面进步,半导体分析也获得了飞速发展。目前通过各种具有各自特色的分析法的研究,从而获得了更加广泛和多方面的资料。但是,各种分析法 First, the preamble As we all know, impurities in the semiconductor plays a very important role. While measuring its conductivity and controlling these impurities, it is necessary to analyze directly the type and amount of these impurities. However, it is very difficult to conduct such an analysis 20 years ago, so I had to rely on specialized electrical measurements. Since then, due to the needs of the development of the semiconductor industry, and the overall progress of analytical chemistry, semiconductor analysis has also been rapid development. At present, through a variety of studies with their own unique analytical methods, more extensive and multifaceted information has been obtained. However, a variety of analytical methods