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本文介绍大功率微波换能器用ZnO薄膜的制备及性能。采用这种薄膜的换能器用于Au/Cr/ZnO/Au/Cr/c-A1_2O_3结构的延迟线,在f_0=3GHz时,实测输入平均功率可达1W,脉冲功率可达10W以上。
This article describes the preparation and performance of ZnO thin films for high power microwave transducers. The transducer using this thin film is used for the delay line of Au / Cr / ZnO / Au / Cr / c-Al 2 O 3 structure. At f_0 = 3GHz, the measured average input power can reach 1W and the pulse power can reach 10W.