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在单粒子试验中,束流均匀性是指待辐照器件位置平面上离子束斑注量密度分布的均匀程度,在某种程度上它反映了辐照器件的束流品质,其结果会直接影响到单粒子试验中待辐照器件的离子注量准确测量。布鲁克海文国家实验室(BNL)、美国的A&M大学等都在其相应的单粒子试验装置上建立了束流均匀性测量系统,美国、欧空局对单粒子试验中束流均匀性提出了明确要求,要求束流非均匀度应小于±10%。为真实准确地反映单粒子试验中样品平面的束斑均匀性,设计并实现了单探测器束斑均匀性
In single-particle experiments, beam uniformity refers to the uniformity of the ion beam spot density distribution on the plane of the device to be irradiated. To some extent, it reflects the beam quality of the irradiation device and the result is directly Affect the accurate measurement of the ion fluence of the device to be irradiated in the single particle test. The Brookhaven National Laboratory (BNL) and the A & M University in the United States all established a beam uniformity measurement system on their corresponding single-particle test setup. The United States and ESA proposed the uniformity of the beam in a single-particle test Clearly requires that beam uniformity be less than ± 10%. In order to truly and accurately reflect the beam spot uniformity in the single particle test, a single detector beam spot uniformity