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细菌的快速检测可以对疾病、疫情和环境污染给出早期预警,以便及早控制,防止病菌的蔓延。介绍了一种可用于快速细菌检测的分子筛芯片,给出了分子筛芯片的制备方法。通过研究KOH溶液对硅的不同晶面的湿法腐蚀速率以及这种速率差异对不同晶向硅片腐蚀形态的影响,研究结果表明,能用于分子筛芯片的只能是(110)型硅,进一步研究版图的排布与最后刻蚀结果之间的关系,得出支撑结构的长边必须是与(111)晶面方向垂直才能满足芯片的结构要求。最后介绍了其在细菌检测领域以及氢气提纯等方面的应用。
Rapid detection of bacteria can give early warning of disease, outbreaks and environmental pollution in order to control early and prevent the spread of germs. A molecular sieve chip that can be used for rapid bacterial detection is introduced, and the preparation method of the molecular sieve chip is given. The effect of KOH solution on the wet etching rate of different crystal planes of silicon and the effect of this rate on the corrosion morphology of silicon wafers were studied. The results show that (110) Si can only be used in molecular sieve chips, Further study of the relationship between layout and final etching result shows that the long side of the support structure must be perpendicular to the (111) plane in order to meet the structural requirements of the chip. Finally, it introduces its application in the field of bacteria detection and hydrogen purification.