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微机械薄膜应力对MEMS器件有较大的影响 ,因此应力测量对于工艺监控和MEMS器件设计是必须的。介绍了微机械薄膜应力的在线测试结构与方法 ,详细分析了各种方法的特点。对于MEMS薄膜应力测试结构设计有一定的参考价值
Micro-mechanical film stress has a greater impact on MEMS devices, so stress measurement is necessary for process monitoring and MEMS device design. The on-line testing structure and method of stress of micro-mechanical film are introduced, and the characteristics of various methods are analyzed in detail. For MEMS film stress test structure design has some reference value