近日,国家863计划项目“超大规模集成电路配套材料”重大专项中的“TDR-150型单晶炉(12英寸MCZ综合系统)”项目在北京正式通过科技部的验收,这标志着拥有自主知识产权和核心技术的大尺寸集成电路与太阳能用单晶硅生长设备,在我国首次研制成功。单晶炉是直拉法制备硅单晶的关键 Recently, the project of “TDR-150 Single Crystal Furnace (12-inch MCZ Integrated System)” in the major project of “National 863 Program Materials for VLSI” formally passed the acceptance by the Ministry of Science and Technology in Beijing, which signifies that with independent knowledge Property rights and core technologies of large-size integrated circuits and monocrystalline silicon solar growth equipment, successfully developed in China for the first time. Single crystal furnace is the key Czochralski silicon crystal