论文部分内容阅读
本文研究了溅射气氛中氮含量及后续热处理对射频溅射法制备的Ｆｅ－Ｎ薄膜的磁性能的影响。电镜分析的结果显示，样品中含有少量Ｆｅ１６Ｎ２。
In this paper, the influence of nitrogen content in sputtering atmosphere and the subsequent heat treatment on the magnetic properties of Fe-N thin films prepared by RF sputtering was studied. Electron microscopy results show that the sample contains a small amount of Fe16N2.