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本文介绍了一个新型结构的高频离子源,它可以用气体、液体和固体物质工作.这一源的工作温度达到了1000℃.因此,它可以产生包括金属在内的多种元素的离子束.目前,已经引出了Al~+、Mg~+、Fe~+、Cr~+、Zn~+、In~+、Ag~+、Cd~+、Sn~+、Sm~+、Hg~+、S~+ P~+、As~+、Se~+、Te~+等离子束,总流强度在几百微安到毫安级,总流中所需离子含量是70—90%,源的工作寿命在40小时到100小时以上.本文主要讨论了这一离子源的结构和工作特性.
This paper presents a new type of high-frequency ion source that can be operated with gases, liquids and solids and has a source temperature of 1000 ° C. Therefore, it can generate ion beams of various elements including metals At present, Al ~ +, Mg ~ +, Fe ~ +, Cr ~ +, Zn ~ +, In ~ +, Ag ~ +, Cd ~ +, Sn ~ +, Sm ~ +, Hg + S ~ + P ~ +, As ~ +, Se ~ +, Te ~ + plasma beam, the total flow intensity in the hundreds of microamps to milliampere level, the total ion content of the ion is 70-90%, the source of work Life expectancy of 40 hours to 100 hours or more.In this paper, the structure and operating characteristics of this ion source are discussed.