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自主设计研制的非球面数控抛光机采用气囊式抛光工具,可抛光100mm以下的非球面光学零件,针对口径35mm凹非球面透镜(顶点曲率半径R=-108.14mm的双曲面),研究了非球面的抛光工艺,并确定了相关工艺参数,抛光时间大约为20min,第二次次抛光后元件面形精度达到1.08μm,满足了该零件的使用要求。相对于现有设备美国Precitich公司的Microfinish 300型CNC非球面抛光机,该抛光设备实现了中等精度要求的小口径非球面元件的高效数控抛光。目前该抛光机已经成功地应用于某光学系统非球面零件的批量生产中。
The self-designed aspheric NC polishing machine adopts the air bag polishing tool to polish the aspheric optical components under 100mm. For non-spherical aperture 35mm aspherical lenses (hyperboloid with vertex radius of curvature R = -108.14mm) Spherical polishing process, and to determine the relevant process parameters, polishing time is about 20min, the second time after polishing the component surface accuracy of 1.08μm, to meet the requirements of the parts. Compared with the existing Microfinish 300 CNC aspheric polishing machine from Precitich, USA, the polishing machine achieves efficient NC polishing of medium-precision small-diameter aspheric components. At present, the polishing machine has been successfully used in the mass production of aspheric parts of an optical system.