Subtractive imaging is used to suppress the axial sidelobes and improve the axial resolution of 4 pi microscopy with a higher-order radially polarized(RP)Laguer
We develop a source and mask co-optimization framework incorporating the minimization of edge placement error(EPE) and process variability band(PV Band) into the cost function to compensate simultaneo
Fifth harmonic generation(5th HG)of a Nd:glass laser is an effective way to acquire high-energy coherent deepultraviolet radiation near 200 nm.In this work,casc