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采用聚焦毛细管将通用的极紫外光源引出法兰口之外,并控制光束发散角,以匹配平行光管孔径角。分析计算了直接用光源照亮靶盘的情形,光束不能充满有效主镜面上的直径;设计使用聚焦毛细管,使光束充满平行光管孔径角,并对极紫外平行光管有无毛细管两种状态进行测试。测试结果表明,采用聚焦毛细管后,扩大了光束的发散角,并且无毛细管的最大光子计数接近1×105个,加毛细管后最大光子计数能达到1×104个。测试数据说明极紫外聚焦毛细管的传输效率可以达到10%,能够满足极紫外平行光管的各项技术指标要求。
A focused capillary tube is used to lead the universal EUV light source out of the flange opening and control the beam divergence angle to match the aperture angle of the parallel light pipe. The situation of illuminating the target disk directly with the light source is analyzed and calculated. The beam can not fill the diameter of the effective primary mirror. The focusing capillary is designed to make the beam full of the aperture angle of the parallel light tube. carry out testing. The test results show that the divergence angle of the beam is enlarged after the focusing capillary tube is used, and the maximum photon count of the capillary without capillaries is close to 1 × 105, and the maximum photon counting after the capillary tube can reach 1 × 104. The test data shows that the transmission efficiency of the extreme ultraviolet focusing capillary can reach 10%, which can meet the technical specifications of the extreme ultraviolet parallel light pipe.