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正弦相位调制(SPM)干涉测量技术用于表面形貌测量时,需要帧速高于300 frame/s的图像传感器,同时要求调制信号频率与图像传感器帧速成确定的整数倍关系。提出一种基于低速CCD(30 frame/s)的帧速可调的高速图像传感技术,通过控制每帧像素总数提高CCD帧速,研制出一种高帧速图像传感器,帧速可达300~1600 frame/s,且每帧大小连续可调。将该CCD传感器用于正弦相位调制干涉泰曼-格林干涉仪,测量镀膜玻璃板表面形貌,当CCD图像传感器的帧速与调制信号频率呈16,8,4倍的关系时,得到玻璃板表面形貌的轮廓平均算术偏差Ra小于1.8 nm,重复精度优于3 nm。
Sine Phase Modulation (SPM) interferometry techniques require an image sensor with a frame rate higher than 300 frame / s for surface topography measurements, and require an integral multiple of the modulation signal frequency to the image sensor frame rate. A high-speed image sensing technique based on low-speed CCD (30 frame / s) with adjustable frame rate is proposed to improve the CCD frame rate by controlling the total number of pixels per frame. A high frame rate image sensor with frame rate up to 300 ~ 1600 frame / s, and each frame size continuously adjustable. The CCD sensor is used for sinusoidal phase modulation interferometric Terman-Green interferometer to measure the topography of coated glass. When the frame rate of CCD image sensor is 16, 8, and 4 times the modulation signal frequency, the glass plate The average arithmetic surface roughness Ra is less than 1.8 nm and the repeatability is better than 3 nm.