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采用射频磁控溅射的方法制备了Ti含量不同的Ta(Ti)N涂层并研究了涂层的微观结构和性能。扫描电子显微镜(SEM)照片显示涂层结构致密无大的孔洞。XRD结果显示无Ti掺杂的涂层为面心立方结构的TaN,Ti掺杂的Ta(Ti)N涂层随着Ti掺杂量的增加TaN的衍射峰向高角度偏移,偏移的原因是形成了Ta(Ti)N固溶体。固溶体的形成使Ta(Ti)N涂层的纳米硬度明显高于TaN涂层的纳米硬度。Tafel外推结果表明在PBS溶液中,Ta(Ti)N涂层后的316L不锈钢的耐腐蚀性明显好于基体316L不锈钢的耐腐蚀性。血液相容性实验结果表明Ta(Ti)N涂层的血液相容性明显好于316L不锈钢基体的血液相容性。
The Ta (Ti) N coatings with different Ti contents were prepared by RF magnetron sputtering and the microstructure and properties of the coatings were investigated. Scanning electron microscopy (SEM) photographs show that the coating has a dense structure without large pores. XRD results showed that the coating without Ti doping was a face-centered cubic TaN. The Ti-doped Ta (Ti) N coating shifted the diffraction peak of TaN to high angle with the increase of Ti doping, The reason is that Ta (Ti) N solid solution is formed. The formation of solid solution makes the nano-hardness of Ta (Ti) N coating significantly higher than the nano-hardness of TaN coating. The Tafel extrapolation results show that the corrosion resistance of Ta (Ti) N-coated 316L stainless steel in PBS solution is significantly better than that of the base 316L stainless steel. The blood compatibility test results show that the blood compatibility of the Ta (Ti) N coating is significantly better than that of the 316L stainless steel matrix.