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报道 COIL激光用变形反射镜的介质反射多层膜实验。在真空镀膜机内制备了膜系Sub/ Ag( Si O2 / Hf O2 ) 4/ air和 Sub/ Ag( Yb F3 / Zn S) 3 / air,反射率分别为 99.90 %和 99.87%。在经历 1 0 9次循环后变形镜物理特性无变化。研究了 COIL激光辐射下热畸变和损伤特性。分别在功率密度为 1 .52 k W/ cm2和 1 .1 8k W/ cm2的 COIL激光辐照下 ,这两种膜系的变形镜波前变化相应为 0 .3 7λ和 0 .54λ,因此对于变形镜 1 k W/ cm2 激光功率密度是安全可靠的。
Reported COIL laser with deformable mirror dielectric reflection multilayer film experiment. Films Sub / Ag (Si O2 / Hf O2) 4 / air and Sub / Ag (Yb F3 / Zn S) 3 / air were prepared in a vacuum coater with reflectivities of 99.90% and 99.87%, respectively. There was no change in the physical properties of the deformable mirror after 109 cycles. The thermal distortion and damage characteristics of COIL laser were studied. Under the COIL laser with power densities of 1.52 k W / cm2 and 1.18 k W / cm2 respectively, the wavefront changes of the two films were 0.37λ and 0.54λ, respectively Laser power density of 1 k W / cm2 for deformable mirrors is safe and reliable.