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在上期本专栏的《掩膜版寿命受到的雾状缺陷限制》一文中,我们讨论了掩膜版上雾状缺陷的主要类型和曝光波长为193和248nm时的掩膜版寿命。
In the last issue of this column entitled “Limitations of Haze Defects in Mask Lifetimes,” we discussed the main types of haze defects on masks and mask life at exposure wavelengths of 193 and 248 nm.