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1.前言金属膜电阻器广泛应用于电视机、收录机及各种电子仪器设备。我国自五十年代以来一直沿用苏联引进的旧工艺一“蒸镀法”生产金属膜电阻器。其缺点是;产量低,每炉只能生产数千只;电阻器阻值分散;电阻温度系数高;操作复杂,不易控制。目前国外广泛采用“磁控溅射法”生产金属膜电阻器,单炉产量可达30万只以上,生产的金属膜电阻器质量较高,而且生产成本大幅度下降,是较先进的生产方法。我国自1984年以来,相继从美国、日本引进了十余套磁控溅射设备,使我国的金属膜电阻器的生产向前迈进了一大步。然而,该设备生产金属膜电阻器所需的合金靶材仍依赖进口、而且价格昂贵。
1. Introduction Metal film resistors are widely used in television sets, tape recorders and various electronic equipment. Since the 1950s, China has been using the old process of the Soviet Union to introduce a “evaporation method” to produce metal film resistors. The disadvantage is: low output, each furnace can only produce thousands of; resistor resistance dispersion; resistance temperature coefficient high; complex operation, not easy to control. Currently widely used abroad, “magnetron sputtering” production of metal film resistors, single furnace output up to 300,000 or more, the production of high quality metal film resistors, and substantial reduction in production costs, is more advanced production methods . Since 1984, China has successively introduced over ten sets of magnetron sputtering equipment from the United States and Japan, making the production of metal film resistors in our country a big step forward. However, the alloy targets needed to produce metal film resistors for this device are still imported and expensive.