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介绍了一种采用陶瓷基座、陶瓷膜片制备的压力传感器。它以陶瓷膜片为受载弹性体,利用厚膜电阻的压阻效应,以厚膜工艺技术制得性能优良,价格低廉的陶瓷压阻式压力传感器。使压力传感器的应用范围进一步拓宽。
A pressure sensor with ceramic base and ceramic diaphragm is introduced. It is a ceramic diaphragm as a loaded elastomer, the use of thick-film resistor piezoresistive effect to thick-film technology to obtain excellent performance, low cost ceramic piezoresistive pressure sensor. The pressure sensor to further broaden the scope of application.