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介绍一种砷化氢发生装置 ,采用蠕动泵自动进液 ,定时电路控制硼氢化钾或硼氢化钠的进液时间 ,并采用单向阀及螺纹口装置防止气体逸出 ,保证了砷化氢发生的均匀性和重复性。
A kind of arsine generator was introduced. The peristaltic pump was used to automatically feed liquid. The timing circuit controlled the inlet time of potassium borohydride or sodium borohydride, and used one-way valve and screw thread to prevent gas from escaping. Uniformity and repeatability occurred.