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前言电子显微镜自1932年问世以来,经过半个世纪的发展,不但作为显微镜主要指标的分辨率已由开始时的一百埃提高到2—3埃,可以直接分辨原子,并且还能进行毫微米(10埃)尺度的晶体结构及化学组成的分析,成为全面评价固体微观特征的综合性仪器。电子显微镜在固体科学中的应用经历了三个高潮:首先是50—60年代的薄晶体中位错等晶体缺陷的衍衬象的观察;其次是70年代的极薄晶体的高分辨结构象及原子象的观察;还有就是近几年来兴起的分析电子显微学,对几十埃区域的固体,用X射线能谱及电子能量损失谱进行成分分析以及用微束电子衍射进行结构分析。这些成就无疑地将推动包括固体物理、固体化学、固体电子学、材料科学、地质矿物、晶体学等学科在内的固体科学的发展。
Introduction Since the advent of electron microscopy in 1932, after half a century of development, not only has the resolution as a major indicator of microscopy been raised from one hundred angstroms to 2-3 angstroms at the beginning, it can directly distinguish atoms and can also make nanoscale (10 A) scale crystal structure and chemical composition analysis, a comprehensive evaluation of solid micro-features of the integrated instrument. The application of electron microscopy in solid science has undergone three ups and downs: the first is the observation of diffraction-like images of dislocations and other crystal defects in thin crystals in the 1950s-1960s, the second is the high-resolution structural images of extremely thin crystals in the 1970s, Atomic image observation; there is the rise of the recent years, analytical electron microscopy, a few dozen areas of solid, with X-ray energy spectra and electron energy loss spectrum composition analysis and micro-beam electron diffraction structure analysis. These achievements undoubtedly will promote the development of solid science including solid state physics, solid chemistry, solid-state electronics, materials science, geology and mineralogy, and crystallography.