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本文利用等离子体电荷信号和等离子体光信号的特性,研制成功可同时控制喷嘴-工件距离和光束焦点位置的双闭环控制系统。
Based on the characteristics of plasma charge signal and plasma optical signal, this paper developed a double closed-loop control system that can successfully control the nozzle-workpiece distance and the beam focus position.