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A liquid-solid-gas interface deposition method to prepare nanoparticle thin films is presented in this paper. The nanoparticles in the part of suspension located close to the solid-liquid-gas interface grow on the substrate under the influence of interface force when the partially immersed substrate moves relatively to the suspension. By using statistical theory of the Brownian motion, growth equations for mono-component and multi-component nanoparticle thin films are obtained and some parameters for deposition process are discussed.