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选取质量差异很大的C、Ti、Ti+C离子对钢进行了离子注入,用透射电子显微镜对注入样品横截面进行结构分析。结果表明,注入层结构发生了明显的变化,形成了纳米相镶嵌复合层,复合层的深度大约是相应离子射程的5.9-13.7倍。三种条件下注入,其结构变化有明显的差异。用TRIM95程序对三种离子注入的碰撞参数进行了计算,结果表明,结构的变化明显地与注入参数相关。最后分析了复合层特性的变化与注入条件和结构变化的关系。
The C, Ti, Ti + C ions with different quality were selected for ion implantation of the steel. The cross-section of the injected sample was analyzed by transmission electron microscope. The results show that the structure of the injected layer changes obviously, and the nano-phase inlaid composite layer is formed. The depth of the composite layer is about 5.9-13.7 times of the corresponding ion range. Three conditions of injection, the structural changes have significant differences. The collision parameters of the three ion implants were calculated using the TRIM95 program and the results showed that the structural changes were clearly related to the implantation parameters. Finally, the relationship between the changes of the properties of the composite layer and the conditions of injection and the structural changes was analyzed.