Thermally poled germanium-doped channel waveguides are presented. Multilayer waveguides containing a silicon oxynitride layer were used as charge trapper in this investigation on the effect of the internal field inside the waveguide. Compared to waveguides without the trapping layer, experimental results showed that the induced linear electro-optic (EO) coefficient increases about 20% after poling, suggesting strongly that the internal field is relatively enhanced, and showed it is a promising means for improving nonlinearity by poling in waveguides. Multilayer waveguides containing a silicon oxynitride layer were used as charge trapper in this investigation on the effect of the internal field inside the waveguide. Compared to waveguides without the trapping layer, experimental results showed that the induced linear electro-optic (EO) coefficient increases about 20% after poling, suggesting strongly that the internal field is relatively enhanced, and showed it is promising a way for improving nonlinearity by poling in waveguides.