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石英晶体谐振器振动位移激光干涉测量系统的改进工作业已完成。在本文中作了如下的改进:在激光束上加上直流相位控制和偏移小的低频相位调制而得到数字形式的振动位移幅度。测量和数据处理是通过计算机系统来完成的。经改善的系统可用来测量低达5A的振动位移,在1MHz～10MHz频率范围内,其测量重复性为百分之几。使用这个系统,对平凸SC切石英晶体谐振器的详细振动位移分布进行了测量。
Improvement work on quartz crystal resonator vibration displacement laser interferometry system has been completed. In this paper, the following improvements have been made: Add the DC phase control and the low-offset phase modulation to the laser beam to obtain the amplitude of vibration displacement in digital form. Measurement and data processing is done through a computer system. The improved system can be used to measure vibration displacements as low as 5 A, with repeatability of several percents over the frequency range of 1 MHz to 10 MHz. Using this system, a detailed vibration displacement distribution of a Plano-Convex SC cut quartz crystal resonator was measured.