根据薄膜专委会1987年5月工作会议的决议,由召集单位——科学院微电子中心负责组织的微细加工学组成立暨学术讨论会于9月26日至27日在北京举行。来自科学院、大专院校、电子部、航天部、核工业部、公安部、机械委和北京市属厂、所共32个单位,10个省市的代表42人参加了会议。 According to the resolution of the film special committee working conference held in May 1987, the formation and seminar of micro-processing group organized by the convening unit, the Microelectronics Center of Academy of Sciences, was held in Beijing from September 26 to 27. From the Academy of Sciences, universities, electronics, aerospace department, the Ministry of Nuclear Industry, Ministry of Public Security, Machinery Commission and the Beijing municipal plant, a total of 32 units, representatives from 10 provinces and cities attended the meeting.