激光测温是一种先进的温度测量方法。它具有测量准确、反应速度快、非接触等特点 ,尤其适用于测量真空镀膜中基板的温度。但目前的测温对象只能是固定的基板 ,因而还不完全实用。我们新发展了一种自动测温系统 ,可以对旋转基板的干涉条纹移动进行计数 ,从而实现了旋转基板的测温 ,使激光测温技术更具实用性。介绍了该系统的原理、设计并给出了一次实际测温的结果 Laser temperature measurement is an advanced temperature measurement method. It has the measurement accuracy, fast response, non-contact, etc., especially for measuring the substrate temperature in vacuum coating. However, the current temperature measurement object can only be a fixed substrate, which is not yet fully functional. We have developed a new automatic temperature measurement system that can detect the interference fringe movement of the rotating substrate to achieve the temperature measurement of the rotating substrate so that the laser temperature measurement technology is more practical. The principle of the system is introduced, and the result of an actual temperature measurement is given