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绪言现代化的连续生产要求研制一种高效的、非接触式的检验零件尺寸的系统。这样的系统应该具有高测量精度(误差0.1%),高生产率(1200件/分钟),良好的稳定性和较大的尺寸测量范围。光学系统最能满足这些要求,其中有投影式的、衍射式的、激光相关技术的和其他一些形式。其中大多数系统都采用了基于光学《标尺》的测量原理,例如,光电二极管和麦克尔逊干涉仪中的干涉条纹都起光学《标尺》的作用。制造类似系统的经验告诉我们,对系统的要求存在着内在的矛盾。例如,当在系统中采用光电二极管标尺时,存在着由容许的测量误差所决定
INTRODUCTION Modern continuous production requires the development of a highly efficient, non-contact system for inspecting part dimensions. Such a system should have high measurement accuracy (error of 0.1%), high productivity (1200 pieces / minute), good stability and large size measurement range. Optical systems best meet these requirements, including projection, diffractive, laser-related and many others. Most of these systems use optical “scale” based measurement principles. For example, interference fringes in photodiodes and Michelson interferometers function as optical “scales.” The experience of making similar systems tells us that there is an inherent paradox with the requirements of the system. For example, when using a photodiode scale in a system, there is a margin of error