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超分辨技术是一种无需减小记录波长或增大数值孔径而提高存储密度的方法。Ge Sb Te是一种良好的相变光存储材料 ,在超分辨光盘中可作为掩膜。利用多层膜反射率的矩阵法计算了掩膜为Ge2 Sb2 Te5薄膜的超分辨只读式光盘的光学参数与各膜层厚度之间的关系 ,最后得到了较为理想的膜层厚度匹配。采用磁控溅射法制备了只读式超分辨光盘 ,测量了光盘的光学性质。
Super-resolution technology is a method of increasing the storage density without reducing the recording wavelength or increasing the numerical aperture. Ge Sb Te is a good phase-change optical memory material that can be used as a mask in super-resolution optical disks. The relationship between the optical parameters and the film thickness of super-resolution CD-ROM with Ge2Sb2Te5 film was calculated by using the matrix method of multi-film reflectivity. Finally, the ideal film thickness matching was obtained. A read-only super-resolution optical disk was prepared by magnetron sputtering and the optical properties of the optical disk were measured.