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利用多弧离子镀技术在316L不锈钢和单晶硅上制备了均质和梯度Cr CN薄膜,通过X射线衍射仪(XRD)、扫描电镜(SEM)、X射线光电子能谱仪(XPS)、纳米压痕仪、273A电化学工作站、Revetest划痕测试系统和多功能摩擦磨损试验机等对薄膜的微观结构、力学性能、耐腐蚀性能和摩擦学性能进行表征。结果表明:较之于均质CrCN薄膜,梯度CrCN薄膜平均晶粒较小,Cr_7C_3(421)晶面的结晶度高,力学性能较好;在海水环境下,梯度CrCN薄膜在摩擦过程中对裂纹的萌生及扩展有较强的抑制作用,能有效抵制海水渗透,表现出良好的耐腐蚀性能;与WC摩擦配副对磨时平均摩擦系数与磨损率均较低,磨痕形貌光洁,表现出良好的摩擦学性能。
Homogeneous and gradient CrCN films were prepared on 316L stainless steel and monocrystalline silicon by multi-arc ion plating technique. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy Indenter, 273A electrochemical workstation, Revetest scratch test system and multi-functional friction and wear testing machine and other films on the microstructure, mechanical properties, corrosion resistance and tribological properties were characterized. The results show that the graded CrCN thin films have smaller average grain size and higher crystallinity of Cr 7 C 3 (421) crystal plane than the homogeneous CrCN thin films. In the seawater environment, Of the initiation and expansion of a strong inhibitory effect, can effectively resist the infiltration of seawater, showing good corrosion resistance; and WC friction with the Deputy wear the average friction coefficient and wear rate are low, clean wear scar appearance, performance Out of good tribological properties.