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薄膜表面粗糙度对内应力的测量产生复杂的影响。文章通过理论分析和计算 ,得到如下结论 :表面粗糙度使得内应力的测量值小于其真实值 ;当表面粗糙颗粒可以用球体描述时 ,粗糙度对内应力测量值的影响仅取决于球状颗粒与表平面之间的接触角 ,而与颗粒的半径大小无关 ,若颗粒恰为半球体 ,内应力测量值与实际值之比为 0 .785 4;当粗糙表面轮廓线可以用正弦曲线表示时 ,上述影响则取决于正弦波的波幅和波距之比。
Film surface roughness has a complex effect on the measurement of internal stress. Through theoretical analysis and calculation, the article draws the following conclusions: The surface roughness makes the measured value of internal stress less than its true value. When the surface roughness particles can be described by sphere, the influence of roughness on internal stress measurement depends only on the relationship between spherical particles and The contact angle between the surface plane and the radius of the particle has nothing to do, if the particle is just a hemisphere, the ratio of internal stress measurement and the actual value of 0.785 4; when the rough surface contour can be expressed as a sine curve, The above effects depend on the ratio of the amplitude of the sine wave to the pitch of the wave.