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本文介绍我们研制的高精度动态光电显微镜的工作原理、实验结果、技术性能及其特点。它采用了一种新的对准刻线的光电瞄准方法,瞄准刻线的单次对准精度为2σ≤±0.02μm。刻线移动(工作台运动)的速度可达5mm/s。
This article describes the working principle, experimental results, technical performance and characteristics of the high-precision dynamic light microscope we developed. It uses a new method of aligning the reticle for aiming at a single scribing line with an accuracy of 2σ ≤ ± 0.02μm. Scribe movement (table movement) up to 5mm / s.