一九八三年五月,电子工业部组织了半导体工艺设备考察团赴美考察。该团一行七人,从五月二十一日到六月十四日,代表团在美国参观了八三年Semicon/West展览会,参观考察了硅谷地区的设备厂生产情况,到美国东部也参观了几个设备厂,部分团员专程参观了康奈尔大学的微细加工中心。现将情况介绍如下:一、八三年Semicon/West展览会 In May 1983, the Ministry of Electronics Industry organized a study tour of semiconductor process equipment to the United States. During the eight-three-year Semicon / West exhibition in the United States, the delegation visited the plant production in the Silicon Valley region and went to the eastern United States Visited several equipment factories, some members made a special trip visited the Cornell University micro machining center. Now the situation is as follows: One, eighty-three Semicon / West exhibition