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采用开关电容技术的Boxcar积分原理设计的,为测量电容式压力传感器微电容的接口电路已提出,它由Boxcar积分器,锁存器,脉冲宽度调制器和控制信号电路组成。 这个接口电路,采用3μmP-阱CMOS双层多晶硅栅工艺研制,管芯面积为2.5×3.5mm~2。测试结果表明,接口电路具有较好的灵敏度,它完全适用于与硅集成电容式压力传感器集成在同一芯片上。
An interface circuit designed to measure the capacitance of a capacitive pressure sensor using the Boxcar integral principle of switched capacitor technology has been proposed. It consists of a Boxcar integrator, a latch, a pulse width modulator and a control signal circuit. The interface circuit, using 3μmP-well CMOS double-layer polysilicon gate technology developed, the die area of 2.5 × 3.5mm ~ 2. Test results show that the interface circuit has good sensitivity, it is fully suitable for integration with silicon integrated capacitive pressure sensor on the same chip.