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一、引言 随着传感器的应用日益广泛,传感器的选择性与多功能化问题显得越来越重要。为了得到高灵敏、高精度的敏感器件,就要研究传感器对被测参量(物理量、化学量和生物量)的选择性,即从多个敏感参量中选择出所需的被测量;为了检测同时存在的几种参量(例如工作环境的温度与湿度,气体的成分与浓度和流体的流量、温度与压力等等),就要研究传感器的多功能化。同时,对传感器多功能化的研究,又能促进单一功能传感器性能的提高。
I. INTRODUCTION With the increasing use of sensors, the problem of sensor selectivity and multi-function becomes more and more important. In order to get a sensitive and sensitive device, it is necessary to study the sensor’s selectivity to the measured parameters (physical quantity, chemical quantity and biomass), that is, to select the desired measured quantity from a plurality of sensitive parameters. In order to detect the simultaneous The existence of several parameters (such as the temperature and humidity of the working environment, the composition and concentration of gas and fluid flow, temperature and pressure, etc.), we must study the multi-functional sensor. At the same time, the multi-functional sensor research, but also to promote the performance of single-function sensors.