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论述了激光散斑技术在计量方面的应用。首先介绍了应用二次曝光散斑图测量物体表面的面内位移的原理和方法;在此基础上论述了激光散斑技术针对透明固体的厚度及其非均匀性的测量。其次做了一些实验和理论探索,并根据实验结果进行了详细的计算,实验结果与理论符合较好。由实验检测结果可知这种技术的精度非常高,可广泛应用于表面粗糙度研究、缺陷检测、微振动分析等无损检测领域。
The application of laser speckle measurement in measurement is discussed. First of all, the principle and method of measuring the in-plane displacement of the object surface by using the second-exposure speckle pattern are introduced. Based on the above, the measurement of the thickness and non-uniformity of the transparent solid by laser speckle technique is discussed. Followed by some experiments and theoretical exploration, and based on the experimental results of a detailed calculation, the experimental results in good agreement with the theory. The experimental results show that the accuracy of this technique is very high and can be widely used in the field of non-destructive testing such as surface roughness research, defect inspection and micro vibration analysis.